現在位置首頁 > 會議論文 > 詳目
  • 全文下載
主要題名:Micromachined droplet on demand formation with Shear Mode Piezoelectricity and micron size nozzles
作者姓名:Cheng, C. H.Chang, Shuo-HungHuang, L. S.Li, Ching-ChengWu, Thung-HanHsu, Fu-ChiangHuang, Yu-LinHuang, Jung-Tang
中文關鍵詞:nanojetpackagingfabricationmicro-electro-mechanicalsystemPiezoelectricactuator
摘要:A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process and MEMS post-process. The pressure chamber, immersed micro-fluidic channel and the nozzle plate are fabricated on a single chip. The droplet-on-demand generator with the piezoelectric actuator and the nozzle located on one side of the chip offers planar assembly design for large quantity fabrication with high yield and low cost. The nozzles with diameter of 4 μm were fabricated and 1 μm nozzle behavior was analyzed. Design, analysis and measurements were presented.
貢獻者資料:機電學院/機電科技研究所
論文ID:10623-en-pc-2005-07_1p
典藏單位:國立臺北科技大學
數位物件檔名:10623-en-pc-2005-07_1p.pdf
發行日期:2005-07
統一資源識別號:http://dx.doi.org/10.1109/NANO.2005.1500711
註:©2005 IEEE
資料開放狀態:開放
研討會:Nanotechnology, 2005. 5th IEEE Conference on,11-15 July 2005, Japan
論文起迄頁碼:pp134 - 137 vol. 1