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論文中文名稱:鋁奈米柱陣列-介質種子層薄膜微觀結構與光學特性探討 [以論文名稱查詢館藏系統]
論文英文名稱:Nano-structure and optical property of an aluminum nanorod array upon a seed layer [以論文名稱查詢館藏系統]
院校名稱:臺北科技大學
學院名稱:電資學院
系所名稱:光電工程系研究所
畢業學年度:102
出版年度:103
中文姓名:黃奕誠
英文姓名:Yi-Cheng Huang
研究生學號:101658045
學位類別:碩士
語文別:中文
口試日期:2014-05-28
論文頁數:45
指導教授中文名:任貽均
口試委員中文名:周趙遠鳳;陳隆建;游竟維
中文關鍵詞:鋁奈米柱陣列斜向角度沉積技術種子層填充因子
英文關鍵詞:aluminum nanorod arrayglancing angle depositionseed layerfilling factor
論文中文摘要:本論文,以斜向角度沉積技術,於基板表面製鍍五氧化二鉭直柱陣列,做為種子層。再於五氧化二鉭種子層頂端,斜向沉積鋁奈米斜柱陣列。由於,種子層的競爭效應與成核分佈,有效降低鋁奈米斜柱陣列的填充因子。此外,藉由種子層,改變金屬奈米斜柱陣列的結構參數:直徑、柱狀傾角與孔隙率。並分析與討論,相異結構參數的金屬奈米斜柱陣列,所呈現的光學特性。
論文英文摘要:In this work, an upright Ta2O5 nanorod array is grown first as a seed layer, and the further glancing deposited aluminum is then grown on the top of Ta2O5 nanorods. Owing to the distribution of the seed layer, the filling factor becomes lower than that of a single aluminum nanorod arrays on a bare and smooth substrate. In addition, we apply seed layers to change the characteristics of the metal nanorod arrays including diameter, tilt angle and porosity. The difference of optical properties between aluminum nanorod arrays is analyzed and discussed here.
論文目次:中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 v
圖目錄 vi
第一章 緒論 1
1.1 前言 1
1.2 物理氣相沉積法 2
1.2.1斜向角度沉積技術演進 2
1.2.2斜向沉積技術原理 3
1.3 奈米柱狀結構成長 4
1.3.1遮蔽效應原理 4
1.3.2奈米柱幾何結構 5
1.4奈米柱狀結構參數式 5
1.5研究動機 7
第二章 奈米柱狀陣列與光學特性 8
2.1金屬奈米柱狀陣列 8
2.1.1金屬奈米結構歷史演進 8
2.1.2奈米斜柱光學特性 10
2.2金屬奈米柱光學特性 11
2.2.1偏振光的透射率差異 11
2.2.2金屬奈米柱吸收特性 12
2.3種子層 14
2.3.1序列種子層原理 14
2.3.2序列種子的週期、高度、寬度 15
2.3.3週期金屬奈米柱陣列 18
2.4非序列種子層 19
第三章 實驗架構與量測系統 20
3.1鍍膜系統 20
3.2實驗流程 23
3.3光學量測系統 24
3.4結構分析軟體 25
第四章 實驗結果分析與討論 26
4.1薄膜結構與製鍍參數 26
4.1.1 鋁斜柱陣列薄膜 27
4.1.2 鋁斜柱陣列-介質種子層薄膜 29
4.2薄膜幾何結構比較 31
4.2.1 室溫,種子層對鋁斜柱陣列的影響 31
4.2.2 10°C,種子層對鋁斜柱陣列的影響 33
4.3透射、反射與吸收光譜 34
4.4薄膜光學特性比較 38
4.4.1室溫,種子層對鋁斜柱陣列的光學影響 38
4.4.2 -10°C,種子層對鋁斜柱陣列的光譜影響 40
第五章 結論 41
參考文獻 42
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