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論文中文名稱:量測非均向光學薄膜之反射偏極態與應用 [以論文名稱查詢館藏系統]
論文英文名稱:The polarization states reflected from an anisotropic thin film : measurement and application [以論文名稱查詢館藏系統]
院校名稱:臺北科技大學
學院名稱:電資學院
系所名稱:光電工程系研究所
出版年度:97
中文姓名:陳詠勳
英文姓名:Yung-Hsun Chen
研究生學號:95658025
學位類別:碩士
語文別:中文
口試日期:2008-06-26
論文頁數:70
指導教授中文名:任貽均
口試委員中文名:陳學禮;劉旻忠
中文關鍵詞:非均向薄膜光學常數光學特性
英文關鍵詞:Optical thin filmOptical characteristicOptical constants
論文中文摘要:研究非均向光學薄膜之光學特性,製程上將基板傾斜沈積,可蒸鍍出具有雙折射現象的微觀柱狀結構。量測上提供一個固定入射角的量測方法,藉由稜鏡與
基板耦合,改變入射平面與沈積平面夾角,可增強偏極轉換的反射率。旋轉偏光片(polarizer)改變入射光的線偏極態,反射端則利用旋轉析光片(analyzer)來觀察偏極態的變化,並量測出橢圓參數。因而可利用薄膜的厚度、柱狀傾角、三軸折射率對橢圓參數的靈敏度分析,來優化薄膜的光學常數。
實驗上,以氟化鎂與二氧化矽作為蒸鍍材料,將基板傾斜沈積,其中二氧化矽以電子槍的方式製程,氟化鎂則以物理氣相沉積的方式,應用上,藉由旋轉沉積平面角與改變入射線偏極態,觀察反射偏極態的變化,並討論橢圓率e與橢圓倾角θ可調制的最大範圍。氟化鎂則以熱阻舟蒸鍍方式。
論文英文摘要:The optical properties of anisotropic thin films have been investigated. The tilted-columnar birefringence thin films were prepared by oblique angle deposition method. When the incident angle of light fixes at the certain angle, the polarization
conversion reflectance(PCR) is enhanced by the prism coupling effect and rotating the deposition plane in the prism couple system. The polarization state of the reflected light can be observed for any polarization state of incident light in the rotating analyzer ellipsometry system. The optical constants of an anisotropic film such as the thickness, tilted angle and principle index are determined by fitting the curve of ellipse parameters.
In the experiment, SiO2 and MgF2 as columnar thin films are fabricated in the E-Beam and thermal evaporation system, respectively. The variety of polarization states of the reflected ray is simulated by turning the deposition plane and the transmitted direction of polarizer.
論文目次:目錄

摘 要 i
ABSTRACT ii
誌 謝 iii
目錄 iv
圖目錄 vi
第一章 緒論 1
1.1 前言 1
1.2 光學薄膜的非均向性與量測 2
1.3 偏振態的調制 4
第二章 理論 6
2.1橢圓極化光 6
2.2 橢圓參數e與θ 8
2.3橢圓參數Ψ與△ 9
2.4橢圓參數e、θ與Ψ、△的關係 10
2.5在光強上橢圓極化的偵測 12
第三章 實驗 15
3.1 量測系統 15
3.2儀器校正 17
3.3蒸鍍方式 19
3.4量測方法 20
3.5 樣品準備 21
第四章 量測結果 23
4.1實驗ㄧ 非均向薄膜旋轉偏光片角頻譜橢圓參數 23
4.2實驗二 非均向薄膜旋轉偏光片光譜橢圓參數 40
第五章 模擬與分析 46
5.1光學常數 46
5.2橢圓率與橢圓傾角調制範圍 51
5.2.1 調制範圍隨厚度變化 59
5.2.2 調制範圍隨光譜變化 60
第六章 結論 67
參考文獻 68
論文參考文獻:參考文獻

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論文全文使用權限:同意授權於2009-08-12起公開