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論文中文名稱:週期性結構薄膜與光學特性探討 [以論文名稱查詢館藏系統]
論文英文名稱:The Periodic Structures Thin Film and Optical Properties [以論文名稱查詢館藏系統]
院校名稱:臺北科技大學
學院名稱:電資學院
系所名稱:光電工程系研究所
出版年度:97
中文姓名:來子玠
英文姓名:Zih Jie Lai
研究生學號:95658044
學位類別:碩士
語文別:中文
口試日期:2008-06-26
論文頁數:62
指導教授中文名:任貽均
口試委員中文名:陳學禮;劉旻忠
中文關鍵詞:鋸齒狀薄膜雙折射螺旋薄膜偏極光
英文關鍵詞:zigzag thin-filmbirefringencehelical thin-filmpolarized light
論文中文摘要:本論文使用二氧化鈦材料以電子鎗方式製程,探討當結構隨著縮短週期厚度而轉變時,光學現象的變化情形。以下探討兩種週期性類型:
1.利用交錯沈積方式製鍍出鋸齒狀薄膜,當結構隨著掃描週期減少到臨界點時,鋸齒狀結構將趨近於垂直基板的交錯沈積柱。交錯沈積薄膜在光學上有雙折射現象,當光垂直入射於薄膜,它的光學路徑隨S、P偏振態而改變。將這結構整合到Fabry-Perot當中,將有助於觀察非均向薄膜光學特性的相位延遲。
2.利用斜向沈積方式在基板旋轉下製鍍出螺旋狀薄膜,當結構隨著旋轉速度增加到臨界點時,螺旋狀結構將趨近於柱狀結構。螺旋狀薄膜在光學上有布拉格反射現象,當光垂直入射於薄膜,特定波長下,它的光學路徑隨左、右旋光而改變。
論文英文摘要:In this study, the anisotropic TiO2 films were evaporated using an electron-beam. The optical properties of the film with the decreasing pitch period have been investigated. Two kinds of fabrications are presented below:
1. The zigzag thin films are fabricated using glancing angle bideposition technique. As the period of the structure sweep is reduced to below a critical value, the zigzag structures would be restricted to pillar along the substrate normal direction. The bideposited film have birefringence and the optical path for a ray normal incident on the film is linear polarization dependent. Arranging the bideposited film in the Fabry-Perot configuration would help us in observation of phase retardation caused by the anisotropic optical property of the film.
2. The helical thin films are fabricated using glancing angle deposition technique and the substrate rotation. As the velocity of the structure rotate is increased to below a critical value, the helical structures would be restricted to pillar structures. The helical film have Bragg reflection and the optical path for a ray normal incident on the film is circular polarization dependent.
論文目次:目 錄

摘 要 i
Abstract ii
目 錄 iv
圖 目 錄 vi
表 目 錄 viii
第一章 緒論 1
1.1 均向光學薄膜簡介 1
1.2 非均向薄膜文獻回顧 2
1.2.1加拿大-Michael. J. Brett 團隊 2
1.2.2紐西蘭-Ian J Hodgkinson 團隊 6
1.2.3南韓-Chang Kwon Hwangbo 團隊 8
1.3 斜向沈積技術介紹 10
1.3.1 斜向沈積原理 10
1.3.2遮蔽效應原理 11
1.3.3斜向沈積入射角和柱狀傾角關係 12
1.4 二氧化鈦薄膜簡介 13
1.4.1 二氧化鈦均向薄膜 13
1.4.2二氧化鈦非均向薄膜 14
1.5 非均向性奈米薄膜的光學特性 15
1.6研究動機 16
第二章 週期性結構與光學特性 17
2.1 週期性交錯沈積薄膜 17
2.1.1 交錯沈積技術 17
2.1.2 交錯沈積薄膜的雙折射現象 18
2.1.3 交錯沈積薄膜的生長機制 19
2.1.4雙折射現象 21
2.2 週期性螺旋薄膜 22
2.2.1 旋轉基板蒸鍍的架構 22
2.2.2 螺旋薄膜結構與膽固醇液晶的特性 23
2.3 布拉格反射的原理 24
第三章 實驗與量測分析 27
3.1 實驗須知與操作流程 27
3.1.1 實驗準備 27
3.1.2 蒸鍍系統 28
3.1.3 操作流程 29
3.2 實驗架構與參數設計 31
3.2.1 交錯沈積參數 31
3.2.2 螺旋薄膜參數 32
3.3 光譜量測方式 33
3.3.1 交錯沈積薄膜 33
3.3.2 螺旋薄膜 35
3.4 實驗流程圖 36
第四章 結果與討論 37
4.1 實驗數據-雙折射的討論 37
4.2 窄帶濾光片的設計 45
4.3 實驗數據-布拉格反射波長的討論 49
第五章 結論 53
參考文獻 54
論文參考文獻:參考文獻

[1] 李正中,薄膜光學與鍍膜技術,台北 :藝軒圖書出版社.
[2] K. Robbie,T. Smy,and M. J. Brett, "Fabrication of thin films with highly porous microstructures", J. Vac. Sci. Technol. A Vol. 13, pp. 1032 (1995).
[3] Kevin Robbie,Michael J. Brett and Akhlesh Lakhtakia, "First thin film realization of a helicoidal bianisotropic medium", J. Vac. Sci. Technol. A Vol. 13, pp. 2991 (1995).
[4] K. Robbie, J. C. Sit, and M. J. Brett, "Advanced techniques for glancing angle deposition", J. Vac. Sci. Technol. B Vol. 16, pp. 1115 (1998).
[5] M. Malac and R. F. Egerton and M. J. Brett and B. Dick, "Fabrication of submicrometer regular arrays of pillars and helices", J. Vac. Sci. Technol. B. Vol 17, pp. 2671 (1999).
[6] D. Vick, T. Smy, B.Dick, S. Kennedy, M. J. Brett, "Growth behaviour of engineered porous thin films measurement and modeling", Mater. Res. Soc. Symp. Proc. Vol. 648, pp. 3431 (2001).
[7] B. Dick, M. J. Brett, T. Smy, M. Belov and M. R. Freeman," Periodic submicrometer structures by sputtering", J. Vac. Sci. Technol. B. Vol. 19, pp. 1813 (2001).
[8] Martin O. Jensen, Scott R. Kennedy and Michael J. Brett, "Fabrication of Periodic Arrays of Nanoscale Square Helices", Mat. Res. Soc. Symp. Proc. Vol. 728, pp. 9101 (2002).
[9] B. Dick, M. J. Brett and T. Smy, "Controlled growth of periodic pillars by glancing angle deposition", J. Vac. Sci. Technol. B. Vol. 21, pp. 23 (2003).
[10] B. Dick,M. J. Brett and T. Smy, "Investigation of substrate rotation at glancing incidence on thin-film morphology", J. Vac. Sci. Technol. B, Vol. 21, pp. 2569 (2003).
[11] Scott R. Kennedy and Michael J. Brett, "Porous broadband antireflection coating by glancing angle deposition", Appl opts, Vol 42, pp. 4573 (2003).
[12] Andy C. van Popta, Michael J. Brett, and Jeremy C. Sit, "Double-handed circular Bragg phenomena in polygonal helix thin films", J. Appl. Phys. Vol. 98, pp. 083517 (2005).
[13] Martin O Jensen and Michael J Brett, "Embedded air and solid defects in periodically structured porous thin films", Institute of physics publishing Nanotechnology. Vol. 16, pp. 2639 (2005)
[14] Martin O. Jensen and Michael J. Brett, "Periodically Structured Glancing Angle Deposition Thin Films", IEEE Transactions on nanotechnology. Vol. 4, pp. 269 (2005).
[15] D.A. Gish, M.A. Summers, M.J. Brett, "Morphology of periodic nanostructures for photonic crystals grown by glancing angle deposition", Photonics and Nanostructures Fundamentals and Applications. Vol. 4, pp. 23 (2006).
[16] M.A. Summers, M.J. Brett, "Thermal oxidation of periodically aligned silicon square-spirals", Microelectronic Engineering. Vol. 85, pp. 1222 (2008).
[17] Kevin Robbie, Michael J. Brett and Akhlesh Lakhtakia, "Chiral sculptured thin films", Nature. Vol. 384, pp. 616 (1996).
[18] P.I. Rovira, R.A. Yarussi, R.W. Collins, V.C. Venugopal, A. Lakhtakia, R. Messier K. Robbie, M.J. Brett, "Rotating-compensator multichannel transmission ellipsometry of a thin-film helicoidal bianisotropic medium", Thin Solid Films. Vol. 313, pp. 373 (1998).
[19] K. Robbie, D. J. Broer, M. J. Brett, "Chiral nematic order in liquid crystals imposed by an engineered inorganic nanostructure", Nature. Vol. 399, pp. 764 (1999).
[20] J. C. Sit, S. R. Kennedy, D. J. Broer, and M. J. Brett, "Optical properties of chiral thin films fabricated by glancing angle deposition", Proceedings of SPIE - The International Society for Optical Engineering. Vol. 178, pp. 3790 (1999).
[21] Andy C. van Popta, Matthew M. Hawkeye, Jeremy C. Sit, and Michael J. Brett, "Gradient-index narrow-bandpass filter fabricated with glancing-angle deposition", Opt Lett. Vol. 29, pp. 2545 (2004).
[22] Matthew M. Hawkeye, Andy C. van Popta, Jeremy C. Sit, Michael J. Brett, "Chiral and nanostructured optical materials", Proc. of SPIE. Vol. 5577, pp. 707 (2004).
[23] John J. Steele, Andy C. van Popta, Matthew M. Hawkeye, Jeremy. Sit, Michael J. Brett, "Nanostructured gradient index optical filter for high-speed humidity sensing", Sensors and Actuators B. Vol. 120, pp. 213 (2006).
[24] Peter C. P. Hrudey, Bryan Szeto, and Michael J. Brett, "Strong circular Bragg phenomena in self-ordered porous helical nanorod arrays of Alq3",Appl Phys lett. Vol. 88, pp. 251106 (2006).
[25] Jason B. Sorge, Andy C. van Popta, Jeremy C. Sit, and Michael J. Brett, "Circular birefringence dependence on chiral film porosity", Optics express. Vol. 14, pp. 10550 (2006).
[26] Andy C. van Popta, June Cheng, Jeremy C. Sit, and Michael J. Brett, "Birefringence enhancement in annealed TiO2 thin films", J. Appl. Phys. Vol. 102, pp. 013517 (2007).
[27] Kyrylo V Tabunshchyk, Matthew M Hawkeye, Andriy Kovalenko, and Michael J Brett, "Three-dimensional simulation of periodically structured thin films with uniaxial symmetry", J. Phys. D: Appl. Phys. Vol. 40, pp. 4936 (2007).
[28] D. Vick, L.J. Friedrich, S.K. Dew, M.J. Brett, K. Robbie, M. Seto, T. Smy, "Self-shadowing and surface diffusion effects in obliquely deposited thin flms", Thin Solid Films. Vol. 339, pp. 88 (1999).
[29] T. Smy, D. Vick, M. J. Brett, S. K. Dew, A. T. Wu, J. C. Sit, and K. D. Harris, "Three-dimensional simulation of film microstructure produced by glancing angle deposition", J. Vac. Sci. Technol. A. Vol. 18, pp. 2507 (2000).
[30] K. D. Harris and D. Vick, T. Smy, M. J. Brett, "Column angle variations in porous chevron thin films", J. Vac. Sci. Technol. A. Vol. 20, pp. 2062 (2002).
[31] J. C. Sit, D. J. Broer, and M. J. Brett, "Optical devices fabricated from porous thin films embedded with liquid crystals", IEEE, Vol. 99, pp. 123 (1999).
[32] Andy C. van Popta, Jeremy C. Sit, and Michael J. Brett, "Optical properties of porous helical thin films", Appl Opt. Vol. 43, pp. 3632 (2004).
[33] Ian J. Hodgkinson, Peter I. Bowmar, and Qi hong Wu, "Scatter from tilted-columnar birefringent thin films: observation and measurement of anisotropic scatter distributions", Appl Opt. Vol. 34, pp. 163 (1995).
[34] Ian Hodgkinson, Sarah Cloughley, Qi Hong Wu, and Samer Kassam, "Anisotropic scatter patterns and anomalous birefringence of obliquely deposited cerium oxide films", Appl Opt. Vol. 35, pp. 5563 (1996).
[35] Ian Hodgkinson and Qi hong Wu, "Serial bideposition of anisotropic thin films with enhanced linear birefringence", Appl opt Vol. 38, pp. 3621 (1999).
[36] Akhlesh Lakhtakia, Ian J. Hodgkinson, "Spectral response of dielectric thin-film helicoidal bianisotropic medium bilayer", Optics Communications. Vol. 167, pp. 191 (1999).
[37] Qihong Wu, Ian J. Hodgkinson, Akhlesh Lakhtakia, "Circular polarization filters made of chiral sculptured thin films: experimental and simulation results", Opt. Eng. Vol. 39, pp. 1863 (2000).
[38] Ian J. Hodgkinson, Qi hong Wu, Akhlesh Lakhtakia, Martin W. McCall, "Spectral-hole filter fabricated using sculptured thin-film technology", Optics Communications. Vol. 177,pp. 79 (2000).
[39] Ian J. Hodgkinson, Qi h. Wu, Matthew Arnold, Martin W. McCall, Akhlesh Lakhtakia, "Chiral mirror and optical resonator designs for circularly polarized light: suppression of cross-polarized reflectances and transmittances", Optics Communications. Vol. 210, pp. 201 (2002).
[40] Qi Hong Wu, Lakshman De Silva, Matthew Arnold, and Ian J. Hodgkinson, "All-silicon polarizing filters for near-infrared wavelengths", J. Appl. Phys Vol. 95, pp. 403 (2004).
[41] E.D. Walsby, M. Arnold, Q.-h. Wu, I.J. Hodgkinson, R.J. Blaikie, "Growth and characterisation of birefringent films on textured silicon substrates", Microelectronic Engineering Vol. 78, pp. 436 (2005).
[42] Lakshman De Silva; Ian Hodgkinson; Petra Murray; Qi Hong Wu; Matthew Arnold; John Leader; Andrew Mcnaughton, "Natural and Nanoengineered Chiral Reflectors: Structural Color of Manuka Beetles and Titania Coatings", Electromagnetics Vol. 25, pp. 391 (2005).
[43] Lakshman De Silva and Ian Hodgkinson, "Fabrication of structurally chiral Sc2O3 films and observation of Bragg resonance at deep UV wavelengths", J. Vac. Sci. Technol. A. Vol. 25, pp. 1118 (2007).
[44] A. J. McPhun, Q.H. Wu and I.J. Hodgkinson, "Birefringent rugate filters", Electronics Letters, Vol. 34 pp. 360 (1998).
[45] I.J. Hodgkinson, Q.H. Wu, N.L. Moise, "Anisotropic antireflection coatings: use as a laser intracavity polarization-direction selector", Optics & Laser Technology, Vol. 31, pp. 295 (1999).
[46] Ian Hodgkinson and Qi Hong Wu, "Birefringent thin-film polarizers for use at normal incidence and with planar technologies", Appl. Phys. Lett. Vol. 74, pp. 1796 (1999).
[47] Sung-Hwa Kim, Chang Kwon Hwangbo, "Influence of Ar ion-beam assistance and annealing temperatures on properties of TiO2 thin films deposited by reactive DC magnetron sputtering", Thin Solid Films Vol. 475, pp. 155 (2005).
[48] Seouk-Hoon Woo and Chang Kwon Hwangbo, "Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition", Appl Opt Vol. 45, pp. 1447 (2006).
[49] Seouk-Hoon Woo and Chang Kwon Hwangbo, "Optical Anisotropy of Microstructure-Controlled TiO2 Films Fabricated by Glancing-Angle Deposition (GLAD)", Journal of the Korean Physical Society, Vol. 48, pp. 1199 (2006).
[50] Yong Jun Park, K. M. A. Sobahan, and Chang Kwon Hwangbo, "Wideband circular polarization reflector fabricated by glancing angle deposition", Optics Express Vol. 16, pp. 5186 (2008).
[51] Byung Jin Chun and Chang Kwon Hwangbo, Jong Sup Kim, "Optical monitoring of nonquarterwave layers of dielectric multilayer filters using optical admittance", Optics Express, Vol. 14, pp. 2473 (2006).
[52] Geon Joon Lee, Young Pak Lee, Sung Goo Jung, Chang Kwon Hwangbo, Sunman Kim, Inkyu Park, "Linear and nonlinear optical properties of one-dimensional photonic crystals containing ZnO defects", J. Appl. Phys. Vol. 102, pp. 073528 (2007).
[53] Seouk-Hoon Woo, Yong Jun Park, Dae-Ho Chang, K. M. A. Sobahan and Chang Kwon Hwangbo, "Wideband Antireflection Coatings of Porous MgF2 Films by Using Glancing Angle Deposition", Journal of the Korean Physical Society, Vol. 51, pp. 1501 (2007).
[54] Gish, D.A., Kiema, G.K., Jensen, M.O., Brett, M.J., "Dye sensitized solar cells using nanostructured thin films of titanium dioxide," Materials Research Society Symposium Proceedings, Vol. 836, pp. 131 (2005).
[55] Kennedy, S.R., Brett, M.J., "Porous broadband antireflection coating by glancing angle deposition, " Appl. Optics. Vol. 42, pp. 4573 (2003).
[56] Kennedy, S.R., Brett, M.J, Miguez, H., Toader, O, John, S., "Optical properties of a three-dimensional silicon square spiral photonic crystal, ", Photon. Nanostruct, Vol. 1, pp. 37 (2003).
[57] K. Kaminska, K. Robbie, "Birefringent Omnidirectional Reflector," Appl. Optics, Vol. 43, pp. 1570 (2004).
[58] Steele, J.J., van Popta, A.C., Hawkeye, M.M., Sit, J.C., Brett, M.J., "Nanostructured gradient index optical filter for high-speed humidity sensing, " Sensor Actuat. B-Chem. Vol. 120, pp. 213 (2006).
[59] Van Popta, A.C., Hawkeye, M.M., Sit, J.C., Brett, M.J., "Gradient-index narrow-bandpass filter fabricated with glancing-angle deposition", Optics Letters Vol. 29, pp. 2545 (2004).
[60] K, Kaminska, K, Robbie, "Birefringent Omnidirectional Reflector", Appl. Optics, Vol. 43, pp. 1570 (2004).
[61] J, M, Nieuwenhuizen and H, B,. Haanstra , "Microfractography of thin films" , Philips Tech. Rev., Vol. 27, pp. 87 (1966).
[62] Tait, R.N., Smy, T., Brett, M.J., "Modelling and characterization of columnar growth in evaporated films," Thin Solid Films, Vol. 226, pp. 196 (1993).
[63] G. Atanassov, R. Thielsch, and D. Popov, “Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation,” Thin Solid Films Vol. 223, pp. 288 (1993).
[64] H. Sankur and W. Gunning, “Sorbed water and intrinsic stress in composite TiO2–SiO2 films,” J. Appl. Phys. Vol. 66, pp. 807 (1989).
[65] Hubert Selhofer, Elmar Ritter, and Robert Linsbod, ”Properties of titanium dioxide films prepared by reactive electron-beam evaporation from various starting materials” Applied Optics Vol. 41, pp. 756 (2002).
[66] Sumei, Wang, Guodong, Xia, Hongbo, Hea,Kui, Yia, Jianda, Shao, Zhengxiu Fan, "Structural and optical properties of nanostructured TiO2 thin films fabricated by glancing angle deposition", Journal of Alloys and Compounds Vol. 431, pp. 287 (2007).
[67] Horowitz, F., Macleod, H.A., “Determination of principal refractive indices of birefringent films,” Optical Interference Coatings. Vol.6, pp. 203 (1988).
[68] Jan Lintymer, Nicolas Martin, Jean-Marie Chappe, Jamal Takadoum, "Glancing angle deposition to control microstructure and roughness of chromium thin films", Wear. Vol. 264, pp. 444 (2008).
[69] Kennedy, S.R., Brett, M. J. ”Advanced techniques for the fabrication of square spiral photonic crystals by chancing angle deposition,” Jounrnal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, pp. 1184 (2004).
[70] Andy C. van Popta, June Cheng, Jeremy C. Sit, and Michael J. Brett, "Birefringence enhancement in annealed TiO2 thin films", journal of applied physics Vol. 102, pp. 013517 (2007).
[71] R. Figueroa, Tersio G.S. Cruz, A. Gorenstein, "WO3 pillar-type and helical-type thin film structures to be used in microbatteries", Journal of Power Sources Vol. 172, pp. 422 (2007).
[72] M. Schadt and J. Fu‥nfschilling, ”New liquid crystal polarized color projection principle,’’ Jpn. J. Appl. Phys., Vol. 29, pp. 1974 (1990).
[73] Sean M. Pursel and Mark W. Horn, “Prospects for nanowire sculptured-thin-film devices ”, J. Vac. Sci. Technol. B Vol. 25, pp. 2611 (2007).
[74] P. Yeh and C. Gu, "Optics of Liquid Crystal Displays", john Wiley & Sons,
inc, Chapter 7, (1999).
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