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論文中文名稱:銀奈米柱陣列薄膜之非均向光學量測與分析 [以論文名稱查詢館藏系統]
論文英文名稱:The Measurement of Anisotropic Optical Constants for a Silver Nanorod Array [以論文名稱查詢館藏系統]
院校名稱:臺北科技大學
學院名稱:電資學院
系所名稱:光電工程系研究所
畢業學年度:97
出版年度:98
中文姓名:林晉德
英文姓名:Chin-Te Lin
研究生學號:96658010
學位類別:碩士
語文別:中文
口試日期:2009-06-26
論文頁數:50
指導教授中文名:任貽均
口試委員中文名:藍永強;陳至信
中文關鍵詞:銀奈米柱陣列walk-off干涉儀
英文關鍵詞:Ag nanorod arraywalk-off interferometer
論文中文摘要:利用電子鎗蒸鍍系統與斜向沉積技術 (oblique angle deposition) 所造成的遮蔽效應,製鍍出具有柱狀結構之金屬薄膜。
在實驗量測上,利用walk-off干涉儀,量測垂直於薄膜沉積平面之偏振光(s-polarization)與平行於薄膜沉積平面之偏振光(p-polarization)的透射率與反射率,及s、p偏振光正向入射於銀奈米柱陣列薄膜在特定波長下與空氣的透射式與反射式相位差,由透射係數與反射係數並利用生物型掃描式電子顯微鏡觀察銀奈米柱陣列薄膜之厚度,求得在特定波長下s偏振光的折射率。另外,利用橢圓儀量測技術進行銀奈米柱陣列薄膜的量測求得其雙折率差,並利用s偏振光的折射率推算可能的p偏振光折射率。
論文英文摘要:The metal thin films with microscopic columnar structures are fabricated using electron beam gun evaporation system and oblique angle deposition technique.
The transmission and reflection coefficients for s-polarization and p-polarization of silver nanorod array are measured by walk-off interferometer. Besides transmission and reflection intensities, phase difference between thin film and air are also measured. From the transmission and reflection coefficients, the equivalent refractive index for s-polarization can be derived. The birefringence of silver nanorod array is measured by ellipsometry and compared with s-polarization measurement to get the equivalent refractive index for p-polarization light.
論文目次:中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 緒論與文獻回顧 1
1.1 前言 1
1.2 金屬斜柱陣列的光學特性 2
1.2.1 遮蔽效應 2
1.2.2 金屬陣列薄膜之吸收 3
1.2.3 負折射率與負折射現象 4
1.3 非均向金屬薄膜之雙折射率量測 9
1.4 walk-off干涉儀 10
第二章 原理與介紹 12
2.1 等效折射率與相對本質阻抗 12
2.2 透射係數與反射係數 14
2.3 干涉光束 14
2.4 干涉光源 18
第三章 實驗與量測 20
3.1 蒸鍍系統 20
3.2 製鍍步驟 21
3.3 金屬斜柱銀的製鍍 22
3.4 量測元件校正與walk-off干涉儀架設 23
3.4.1 雷射光源校正 23
3.4.2 雷射光源輸出波長確認 25
3.4.3 旋轉偏振片與旋轉檢偏片校正 25
3.4.4 四分之ㄧ波板校正 25
3.4.5 二分之ㄧ波板校正 26
3.4.6 walk-off干涉儀架設 27
3.5 量測 28
3.5.1 透射率光譜量測 28
3.5.2 透射率量測 28
3.5.3 反射率量測 29
3.5.4 透射光絕對相位差量測 30
3.5.5 反射光絕對相位差量測 31
第四章 結果與討論 32
4.1 透射率光譜 32
4.2 透射率與反射率 39
4.2.1 透射率 39
4.2.2 反射率 40
4.3 透射光絕對相位差與反射光絕對相位差 41
4.3.1 透射光絕對相位差 41
4.3.2 反射光絕對相位差 43
4.4等效折射率與相對本質阻抗 45
4.5 相對介電係數與相對導磁係數 46
第五章 結論 48
參考文獻 49
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論文全文使用權限:同意授權於2009-08-06起公開